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金属/n型氮化镓肖特基接触处的界面间隙态和肖特基势垒不均匀性

Interface gap states and Schottky barrier inhomogeneity at metal/n-type GaN Schottky contacts.

作者信息

Mamor M

机构信息

Physics Department, College of Science, Sultan Qaboos University, PO Box 36 Muscat 123, Sultanate of Oman.

出版信息

J Phys Condens Matter. 2009 Aug 19;21(33):335802. doi: 10.1088/0953-8984/21/33/335802. Epub 2009 Jul 24.

DOI:10.1088/0953-8984/21/33/335802
PMID:21828610
Abstract

The barrier heights (BH) of various metals including Pd, Pt and Ni on n-type GaN (M/n-GaN) have been measured in the temperature range 80-400 K with using a current-voltage (I-V) technique. The temperature dependence of the I-V characteristics of M/n-GaN have shown non-ideal behaviors and indicate the presence of a non-uniform distribution of surface gap states, resulting from the residual defects in the as grown GaN. The surface gap states density N(ss), as well as its temperature dependence were obtained from the bias and temperature dependence of the ideality factor n(V,T) and the barrier height Φ(Bn)(V,T). Further, a dependence of zero-bias BH Φ(0Bn) on the metal work function (Φ(m)) with an interface parameter coefficient of proportionality of 0.47 is found. This result indicates that the Fermi level at the M/n-GaN interface is unpinned. Additionally, the presence of lateral inhomogeneities of the BH, with two Gaussian distributions of the BH values is seen. However, the non-homogeneous SBH is found to be correlated to the surface gap states density, in that Φ(0Bn) becomes smaller with increasing N(ss). These findings suggest that the lateral inhomogeneity of the SBH is connected to the non-uniform distribution of the density of surface gap states at metal/GaN which is attributed to the presence of native defects in the as grown GaN. Deep level transient spectroscopy confirms the presence of native defects with discrete energy levels at GaN and provides support to this interpretation.

摘要

利用电流-电压(I-V)技术,在80-400 K的温度范围内测量了包括钯(Pd)、铂(Pt)和镍(Ni)在内的各种金属与n型氮化镓(M/n-GaN)之间的势垒高度(BH)。M/n-GaN的I-V特性的温度依赖性表现出非理想行为,表明存在表面能隙态的非均匀分布,这是由生长态氮化镓中的残余缺陷导致的。表面能隙态密度N(ss)及其温度依赖性是从理想因子n(V,T)和势垒高度Φ(Bn)(V,T)的偏置和温度依赖性中获得的。此外,发现零偏置势垒高度Φ(0Bn)与金属功函数(Φ(m))之间存在依赖关系,界面参数比例系数为0.47。这一结果表明M/n-GaN界面处的费米能级未被钉扎。此外,还观察到势垒高度存在横向不均匀性,势垒高度值呈现两个高斯分布。然而,发现非均匀的肖特基势垒高度(SBH)与表面能隙态密度相关,即随着N(ss)的增加,Φ(0Bn)变小。这些发现表明,SBH的横向不均匀性与金属/氮化镓表面能隙态密度的非均匀分布有关,这归因于生长态氮化镓中本征缺陷的存在。深能级瞬态谱证实了氮化镓中存在具有离散能级的本征缺陷,并为这一解释提供了支持。

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