具有块状压电和机电性能的自分离PZT厚膜。
Self-separated PZT thick films with bulk-like piezoelectric and electromechanical properties.
作者信息
Su Qing, Zhu Benpeng, Lee Joon Hwan, Bi Zhenxing, Shung Kirk, Zhou Qifa, Takeuchi Shinichi, Park Bae Ho, Jia Quanxi, Wang Haiyan
机构信息
Materials Science and Engineering Program, Texas A&M University, College Station, Texas 77843-3128.
出版信息
J Mater Res. 2011 Jun 14;26(11):1431-1435. doi: 10.1557/jmr.2011.115.
Self-separated Pb(Zr(0.52)Ti(0.48))O(3) (PZT) films were processed by a hydrothermal deposition and a rapid thermal separation method, followed by a sol-gel filling and sintering process. The films possess excellent piezoelectric and electromechanical properties close to those of bulk material. The maximum remnant polarization is over 30 μC/cm(2) and the electromechanical coupling factor (k(t)) reaches as high as 0.52. The unique microstructure characteristics of the PZT films, such as their highly dense structure, columnar grains, well-connected grain boundaries, and well-dispersed nanopores, could all contribute to the enhanced piezoelectric and electromechanical properties.
通过水热沉积和快速热分离方法制备了自分离的Pb(Zr(0.52)Ti(0.48))O(3)（PZT）薄膜，随后进行溶胶-凝胶填充和烧结工艺。这些薄膜具有接近块状材料的优异压电和机电性能。最大剩余极化强度超过30 μC/cm²，机电耦合因子（k(t)）高达0.52。PZT薄膜独特的微观结构特征，如其高密度结构、柱状晶粒、连接良好的晶界和分散良好的纳米孔，都有助于增强压电和机电性能。
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