Sun Ping, Wang Gaofeng, Wu Dawei, Zhu Benpeng, Hu Changhong, Liu Changgeng, Djuth Frank T, Zhou Qifa, Shung K Kirk
School of Physical Science and Technology, Wuhan University, Wuhan, China 430072.
Ferroelectrics. 2010;408(1):120-128. doi: 10.1080/00150193.2010.48554.
Development of PMN-PT single crystal/epoxy 1-3 composites for high-frequency ultrasonic transducers application is presented. The composite was fabricated by using a DRIE dry etching process with a 45% volume fraction of PMN-PT. A 35 MHz ultrasound flat transducer was fabricated with the composite, which was found to have an effective electromechanical coupling coefficient of 0.81, an insertion loss of 18 db, and a -6 dB bandwidth as high as 100%. Tungsten wire phantom image shows that the transducer had an axial resolution of 30 μm, which was in good agreement with the theoretical expectation. The initial results showed that the PMN-PT/epoxy 1-3 composite has many attractive properties over conventional piezoelectric materials for medical imaging applications.
本文介绍了用于高频超声换能器的PMN-PT单晶/环氧树脂1-3复合材料的开发。该复合材料采用深反应离子刻蚀（DRIE）干法蚀刻工艺制备，PMN-PT的体积分数为45%。用该复合材料制作了一个35MHz的超声平面换能器，发现其有效机电耦合系数为0.81，插入损耗为18dB，-6dB带宽高达100%。钨丝仿体图像显示该换能器的轴向分辨率为30μm，与理论预期吻合良好。初步结果表明，与传统压电材料相比，PMN-PT/环氧树脂1-3复合材料在医学成像应用中具有许多吸引人的特性。
