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碳纳米管活性基质背板,用于贴合电子设备和传感器。

Carbon nanotube active-matrix backplanes for conformal electronics and sensors.

机构信息

Electrical Engineering and Computer Sciences and Berkeley Sensor and Actuator Center, University of California, Berkeley, California 94702, United States.

出版信息

Nano Lett. 2011 Dec 14;11(12):5408-13. doi: 10.1021/nl203117h. Epub 2011 Nov 9.

Abstract

In this paper, we report a promising approach for fabricating large-scale flexible and stretchable electronics using a semiconductor-enriched carbon nanotube solution. Uniform semiconducting nanotube networks with superb electrical properties (mobility of ∼20 cm2 V(-1) s(-1) and ION/IOFF of ∼10(4)) are obtained on polyimide substrates. The substrate is made stretchable by laser cutting a honeycomb mesh structure, which combined with nanotube-network transistors enables highly robust conformal electronic devices with minimal device-to-device stochastic variations. The utility of this device concept is demonstrated by fabricating an active-matrix backplane (12×8 pixels, physical size of 6×4 cm2) for pressure mapping using a pressure sensitive rubber as the sensor element.

摘要

在本文中,我们报告了一种使用富含半导体的碳纳米管溶液制造大规模柔性可拉伸电子产品的有前途的方法。在聚酰亚胺衬底上获得了具有优异电性能(迁移率约为 20 cm2 V-1 s-1,ION/IOFF 约为 104)的均匀半导体纳米管网络。通过激光切割蜂窝状网格结构使衬底具有可拉伸性,将其与纳米管网络晶体管结合使用,可以实现具有最小器件间随机变化的高度稳健的保形电子器件。通过使用压敏橡胶作为传感器元件,制造用于压力映射的有源矩阵背板(12×8 像素,物理尺寸为 6×4 cm2),证明了这种器件概念的实用性。

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