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薄膜晶体管及其在柔性电子领域的技术进展综述

A Review of the Progress of Thin-Film Transistors and Their Technologies for Flexible Electronics.

作者信息

Mirshojaeian Hosseini Mohammad Javad, Nawrocki Robert A

机构信息

School of Engineering Technology, Purdue University, West Lafayette, IN 47907, USA.

出版信息

Micromachines (Basel). 2021 Jun 2;12(6):655. doi: 10.3390/mi12060655.

Abstract

Flexible electronics enable various technologies to be integrated into daily life and fuel the quests to develop revolutionary applications, such as artificial skins, intelligent textiles, e-skin patches, and on-skin displays. Mechanical characteristics, including the total thickness and the bending radius, are of paramount importance for physically flexible electronics. However, the limitation regarding semiconductor fabrication challenges the mechanical flexibility of thin-film electronics. Thin-Film Transistors (TFTs) are a key component in thin-film electronics that restrict the flexibility of thin-film systems. Here, we provide a brief overview of the trends of the last three decades in the physical flexibility of various semiconducting technologies, including amorphous-silicon, polycrystalline silicon, oxides, carbon nanotubes, and organics. The study demonstrates the trends of the mechanical properties, including the total thickness and the bending radius, and provides a vision for the future of flexible TFTs.

摘要

柔性电子技术使各种技术能够融入日常生活,并推动了对开发革命性应用的探索,如人造皮肤、智能纺织品、电子皮肤贴片和皮肤显示器。包括总厚度和弯曲半径在内的机械特性对于物理柔性电子器件至关重要。然而,半导体制造方面的限制对薄膜电子器件的机械柔性提出了挑战。薄膜晶体管(TFT)是薄膜电子器件中的关键组件,它限制了薄膜系统的柔性。在此,我们简要概述了过去三十年中各种半导体技术在物理柔性方面的发展趋势,包括非晶硅、多晶硅、氧化物、碳纳米管和有机物。该研究展示了包括总厚度和弯曲半径在内的机械性能的发展趋势,并为柔性TFT的未来提供了展望。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3100/8227224/32f0d83cc50e/micromachines-12-00655-g001.jpg

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