Research Institute for Technical Physics and Materials Science, H-1525 Budapest, P.O. Box 49, Hungary.
Nanoscale. 2012 Mar 21;4(6):1824-39. doi: 10.1039/c1nr11067e. Epub 2011 Nov 11.
One of the most interesting features of graphene is the rich physics set up by the various nanostructures it may adopt. The planar structure of graphene makes this material ideal for patterning at the nanoscale. The breathtakingly fast evolution of research on graphene growth and preparation methods has made possible the preparation of samples with arbitrary sizes. Available sample production techniques, combined with the right patterning tools, can be used to tailor the graphene sheet into functional nanostructures, even whole electronic circuits. This paper is a review of the existing graphene patterning techniques and potential applications of related lithographic methods.
石墨烯最有趣的特性之一是它可能采用的各种纳米结构所构成的丰富物理特性。石墨烯的平面结构使其成为纳米级图案化的理想材料。对石墨烯生长和制备方法的研究令人惊叹地快速发展,使得制备任意尺寸的样品成为可能。现有的样品制备技术,结合合适的图案化工具,可以将石墨烯片剪裁成功能纳米结构,甚至是整个电子电路。本文综述了现有的石墨烯图案化技术以及相关光刻方法的潜在应用。