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集成波导-分布布拉格反射镜微腔光机械系统

Integrated waveguide-DBR microcavity opto-mechanical system.

作者信息

Pruessner Marcel W, Stievater Todd H, Khurgin Jacob B, Rabinovich William S

机构信息

Naval Research Laboratory, Washington, DC 20375, USA.

出版信息

Opt Express. 2011 Oct 24;19(22):21904-18. doi: 10.1364/OE.19.021904.

DOI:10.1364/OE.19.021904
PMID:22109043
Abstract

Cavity opto-mechanics exploits optical forces acting on mechanical structures. Many opto-mechanics demonstrations either require extensive alignment of optical components for probing and measurement, which limits the number of opto-mechanical devices on-chip; or the approaches limit the ability to control the opto-mechanical parameters independently. In this work, we propose an opto-mechanical architecture incorporating a waveguide-DBR microcavity coupled to an in-plane micro-bridge resonator, enabling large-scale integration on-chip with the ability to individually tune the optical and mechanical designs. We experimentally characterize our device and demonstrate mechanical resonance damping and amplification, including the onset of coherent oscillations. The resulting collapse of the resonance linewidth implies a strong increase in effective mechanical quality-factor, which is of interest for high-resolution sensing.

摘要

腔光力学利用作用于机械结构的光学力。许多光力学演示要么需要对用于探测和测量的光学组件进行大量对准,这限制了片上光机械设备的数量;要么这些方法限制了独立控制光力学参数的能力。在这项工作中,我们提出了一种光力学架构,该架构包含一个与平面内微桥谐振器耦合的波导 - DBR微腔,能够在片上进行大规模集成,并具有单独调整光学和机械设计的能力。我们通过实验对我们的器件进行了表征,并展示了机械共振阻尼和放大,包括相干振荡的起始。共振线宽的相应变窄意味着有效机械品质因数的大幅增加,这对于高分辨率传感很有意义。

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引用本文的文献

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