Seaberg Matthew D, Adams Daniel E, Townsend Ethan L, Raymondson Daisy A, Schlotter William F, Liu Yanwei, Menoni Carmen S, Rong Lu, Chen Chien-Chun, Miao Jianwei, Kapteyn Henry C, Murnane Margaret M
JILA, University of Colorado, Boulder, Colorado 80309-0440, USA.
Opt Express. 2011 Nov 7;19(23):22470-9. doi: 10.1364/OE.19.022470.
New diffractive imaging techniques using coherent x-ray beams have made possible nanometer-scale resolution imaging by replacing the optics in a microscope with an iterative phase retrieval algorithm. However, to date very high resolution imaging (< 40 nm) was limited to large-scale synchrotron facilities. Here, we present a significant advance in image resolution and capabilities for desktop soft x-ray microscopes that will enable widespread applications in nanoscience and nanotechnology. Using 13 nm high harmonic beams, we demonstrate a record 22 nm spatial resolution for any tabletop x-ray microscope. Finally, we show that unique information about the sample can be obtained by extracting 3-D information at very high numerical apertures.
使用相干X射线束的新型衍射成像技术，通过用迭代相位恢复算法取代显微镜中的光学元件，实现了纳米级分辨率成像。然而，迄今为止，超高分辨率成像（<40纳米）仅限于大型同步加速器设施。在此，我们展示了桌面型软X射线显微镜在图像分辨率和功能方面的重大进展，这将使纳米科学和纳米技术得到广泛应用。利用13纳米高次谐波光束，我们展示了任何桌面型X射线显微镜创纪录的22纳米空间分辨率。最后，我们表明，通过在非常高的数值孔径下提取三维信息，可以获得有关样品的独特信息。
