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多晶硅 MEMS 传感器的液滴致损的两尺度模拟

Two-scale simulation of drop-induced failure of polysilicon MEMS sensors.

机构信息

Dipartimento di Ingegneria Strutturale, Politecnico di Milano, Piazza L. da Vinci 32, 20133 Milano, Italy.

出版信息

Sensors (Basel). 2011;11(5):4972-89. doi: 10.3390/s110504972. Epub 2011 May 4.

DOI:10.3390/s110504972
PMID:22163885
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC3231397/
Abstract

In this paper, an industrially-oriented two-scale approach is provided to model the drop-induced brittle failure of polysilicon MEMS sensors. The two length-scales here investigated are the package (macroscopic) and the sensor (mesoscopic) ones. Issues related to the polysilicon morphology at the micro-scale are disregarded; an upscaled homogenized constitutive law, able to describe the brittle cracking of silicon, is instead adopted at the meso-scale. The two-scale approach is validated against full three-scale Monte-Carlo simulations, which allow for stochastic effects linked to the microstructural properties of polysilicon. Focusing on inertial MEMS sensors exposed to drops, it is shown that the offered approach matches well the experimentally observed failure mechanisms.

摘要

本文提出了一种面向工业的两尺度方法来模拟多晶硅 MEMS 传感器的液滴诱导脆性失效。这里研究的两个长度尺度是封装（宏观）和传感器（细观）。忽略了与微尺度下多晶硅形态相关的问题；相反，在细观尺度上采用了一个能够描述硅脆性开裂的升尺度均匀本构律。该两尺度方法通过全三尺度蒙特卡罗模拟进行验证，该模拟允许与多晶硅的微观结构特性相关的随机效应。本文重点研究了受液滴冲击的惯性 MEMS 传感器，结果表明，所提出的方法很好地符合实验观察到的失效机制。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f03/3231397/764fea2319ca/sensors-11-04972f17.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f03/3231397/764fea2319ca/sensors-11-04972f17.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f03/3231397/b5391991c039/sensors-11-04972f1.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f03/3231397/1fd819b980a3/sensors-11-04972f8.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f03/3231397/3cd5867f493a/sensors-11-04972f9.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f03/3231397/f5c813f142de/sensors-11-04972f10.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f03/3231397/3580266bf3fc/sensors-11-04972f11.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f03/3231397/f1dd40e5ef0a/sensors-11-04972f12.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f03/3231397/ccf1f4fc9902/sensors-11-04972f13.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f03/3231397/43c75015a37d/sensors-11-04972f14.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f03/3231397/94aa38c161fb/sensors-11-04972f15.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f03/3231397/279220b7e079/sensors-11-04972f16.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f03/3231397/764fea2319ca/sensors-11-04972f17.jpg

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本文引用的文献

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Sensors (Basel). 2007 Sep 7;7(9):1817-1833. doi: 10.3390/s7081817.
2
Effects of van der Waals Force and Thermal Stresses on Pull-in Instability of Clamped Rectangular Microplates.范德华力和热应力对矩形夹支微板拉入失稳的影响。
Sensors (Basel). 2008 Feb 15;8(2):1048-1069. doi: 10.3390/s8021048.
3
Modeling Impact-induced Failure of Polysilicon MEMS: A Multi-scale Approach.多尺度方法建模聚硅 MEMS 的冲击失效。
Sensors (Basel). 2017 Apr 30;17(5):995. doi: 10.3390/s17050995.
4
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Sensors (Basel). 2012 Oct 17;12(10):13985-4003. doi: 10.3390/s121013985.
5
Signal processing of MEMS gyroscope arrays to improve accuracy using a 1st order Markov for rate signal modeling.使用一阶马尔可夫模型对速率信号建模，以提高 MEMS 陀螺仪阵列的信号处理精度。
Sensors (Basel). 2012;12(2):1720-37. doi: 10.3390/s120201720. Epub 2012 Feb 7.
Sensors (Basel). 2009;9(1):556-67. doi: 10.3390/s90100556. Epub 2009 Jan 19.