Luo Biao, Wen Zhi-Yu, Wen Zhong-Quan, Chen Li, Qian Rong-Rong
National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, Micro-system Research Center of Chongqing University, Chongqing 400044, China.
Guang Pu Xue Yu Guang Pu Fen Xi. 2011 Nov;31(11):3154-7.
A method which uses MOEMS mirror array optical structure to reduce the high cost of infrared spectrometer is given in the present paper. This method resolved the problem that MOEMS mirror array can not be used in simple infrared spectrometer because the problem of imaging irregularity in infrared spectroscopy and a new structure for spectral imaging was designed. According to the requirements of imaging spot, this method used optical design software ZEMAX and standard-specific aberrations of the optimization algorithm, designed and optimized the optical structure. It works from 900 to 1 400 nm. The results of design analysis showed that with the light source slit width of 50 microm, the spectrophotometric system is superior to the theoretical resolution of 6 nm, and the size of the available spot is 0.042 mm x 0.08 mm. Verification examples show that the design meets the requirements of the imaging regularity, and can be used for MOEMS mirror reflectance scan. And it was also verified that the use of a new MOEMS mirror array spectrometer model is feasible. Finally, analyze the relationship between the location of the detector and the maximum deflection angle of micro-mirror was analyzed.
本文给出了一种利用微机电系统（MOEMS）镜阵列光学结构降低红外光谱仪高成本的方法。该方法解决了由于红外光谱成像不规则问题导致MOEMS镜阵列不能用于简单红外光谱仪的问题，并设计了一种新的光谱成像结构。根据成像光斑的要求，该方法使用光学设计软件ZEMAX和标准特定像差优化算法，对光学结构进行了设计和优化。其工作波长范围为900至1400纳米。设计分析结果表明，当光源狭缝宽度为50微米时，分光光度系统优于6纳米的理论分辨率，可用光斑尺寸为0.042毫米×0.08毫米。验证实例表明，该设计满足成像规则性要求，可用于MOEMS镜反射率扫描。并且还验证了使用新型MOEMS镜阵列光谱仪模型是可行的。最后，分析了探测器位置与微镜最大偏转角之间的关系。
