Department of Nano Science and Engineering, Myongji University, Gyeonggi 449-728, Korea.
Sensors (Basel). 2010;10(1):765-74. doi: 10.3390/s100100765. Epub 2010 Jan 21.
Toluene gas was successfully measured at room temperature using a device microfabricated by a nanoimprinting method. A highly uniform nanoporous thin film was produced with a dense array of titania (TiO(2)) pores with a diameter of 70 ≈ 80 nm using this method. This thin film had a Pd/TiO(2) nanoporous/SiO(2)/Si MIS layered structure with Pd-TiO(2) as the catalytic sensing layer. The nanoimprinting method was useful in expanding the TiO(2) surface area by about 30%, as confirmed using AFM and SEM imaging. The measured toluene concentrations ranged from 50 ppm to 200 ppm. The toluene was easily detected by changing the Pd/TiO(2) interface work function, resulting in a change in the I-V characteristics.
使用纳米压印方法微制造的设备，成功地在室温下测量了甲苯气体。通过这种方法，可以产生具有高度均匀的纳米多孔薄膜，其中包含直径为 70 ≈ 80nm 的致密 TiO(2)（钛）孔阵列。该薄膜具有 Pd/TiO(2)纳米多孔/SiO(2)/Si MIS 分层结构，其中 Pd-TiO(2)为催化传感层。纳米压印方法可有用地将 TiO(2)表面积扩大约 30%，这一点通过 AFM 和 SEM 成像得到了确认。所测量的甲苯浓度范围从 50ppm 到 200ppm。甲苯很容易通过改变 Pd/TiO(2)界面功函数来检测，从而导致 I-V 特性发生变化。
