通过热处理工艺分析 ZnO 纳米棒结构甲苯气敏传感器的响应特性。

Korea Gas Safety Corporation, Wonjung-ro, Maengdong-myeon, Eumseong-gun 27738, Chungcheongbuk-do, Korea.

School of Convergence and Fusion System Engineering, Kyungpook National University, 2559, Gyeongsang-daero, Sangju-si 37224, Gyeongsangbuk-do, Korea.

Sensors (Basel). 2022 May 29;22(11):4125. doi: 10.3390/s22114125.

The sensing characteristics of toluene gas are monitored by fabricating ZnO nanorod structures. ZnO nanostructured sensor materials are produced on a Zn film via an ultrasonic process in a 0.01 M aqueous solution of CHN and Zn(NO)∙6HO. The response of the sensors subjected to heat treatment in oxygen and nitrogen atmospheres is improved by 20% and 10%, respectively. The improvement is considered to be correlated with the increase in grain size. The relationship between the heat treatment and sensing characteristics is evaluated.

通过构建 ZnO 纳米棒结构来监测甲苯气体的传感特性。在 0.01 M 的 CHN 和 Zn(NO)∙6HO 水溶液中通过超声工艺在 Zn 薄膜上制备 ZnO 纳米结构传感器材料。在氧气和氮气气氛中进行热处理后，传感器的响应分别提高了 20%和 10%。这种改善被认为与晶粒尺寸的增加有关。评估了热处理与传感特性之间的关系。