Department of Chemistry & Biochemistry and California NanoSystems Institute, University of California, Los Angeles, CA 90095, USA.
Small. 2012 May 7;8(9):1415-22. doi: 10.1002/smll.201102276. Epub 2012 Feb 20.
To study the effects of hydrocarbon precursor gases, graphene is grown by chemical vapor deposition from methane, ethane, and propane on copper foils. The larger molecules are found to more readily produce bilayer and multilayer graphene, due to a higher carbon concentration and different decomposition processes. Single- and bilayer graphene can be grown with good selectivity in a simple, single-precursor process by varying the pressure of ethane from 250 to 1000 mTorr. The bilayer graphene is AB-stacked as shown by selected area electron diffraction analysis. Additionally propane is found to only produce a combination of single- to few-layer and turbostratic graphene. The percent coverage is investgated using Raman spectroscopy and optical, scanning electron, and transmission electron microscopies. The data are used to discuss a possible mechanism for the second-layer growth of graphene involving the different cracking pathways of the hydrocarbons.
为了研究碳氢前体气体的影响,通过化学气相沉积法,使用甲烷、乙烷和丙烷在铜箔上生长石墨烯。研究发现,较大的分子更容易产生双层和多层石墨烯,这是由于碳浓度更高和不同的分解过程。通过改变乙烷压力从 250 毫托到 1000 毫托,可以在简单的单一前体工艺中以良好的选择性生长单层和双层石墨烯。通过选区电子衍射分析表明,双层石墨烯呈 AB 堆叠。此外,研究发现丙烷仅产生单层到少数层和乱层石墨烯的组合。使用拉曼光谱和光学、扫描电子显微镜以及透射电子显微镜研究了覆盖率。这些数据用于讨论涉及碳氢化合物不同裂解途径的石墨烯第二层生长的可能机制。