Barmak K, Rudman D A, Foner S
Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge 02139.
J Electron Microsc Tech. 1990 Nov;16(3):249-53. doi: 10.1002/jemt.1060160306.
We have developed a technique for preparation of cross-sectional transmission electron microscopy samples of reacted and unreacted Nb/Al multilayer thin films on sapphire substrates. The choice of substrate was found to be extremely important. Sapphire sputters more slowly than Nb and Nb-compounds and therefore makes it possible to obtain the electron transparent regions in the thin films rather than in the substrate. However, the brittle nature of the sapphire restricts the types of thinning techniques that can be used, requiring extensive ion thinning as a final stage.
我们已经开发出一种技术，用于制备反应和未反应的蓝宝石衬底上的Nb/Al多层薄膜的横截面透射电子显微镜样品。发现衬底的选择极为重要。蓝宝石的溅射速度比铌和铌化合物慢，因此有可能在薄膜而非衬底中获得电子透明区域。然而，蓝宝石的脆性限制了可使用的减薄技术类型，需要在最后阶段进行大量离子减薄。
