Heuer J P, Howitt D G
Rockwell International Science Center, Thousand Oaks, California 91360.
J Electron Microsc Tech. 1990 Jan;14(1):79-82. doi: 10.1002/jemt.1060140112.
A method is described for the preparation of cross-sectional samples of thin films for transmission electron microscopy. The technique produces larger amounts of thin region as compared with ion milling and eliminates the problems associated with ion beam damage. The requirement is that the films or multilayers must initially be deposited on a water-soluble substrate such as single-crystal NaCl.
描述了一种制备用于透射电子显微镜的薄膜横截面样品的方法。与离子研磨相比，该技术能产生更多的薄区域，并消除了与离子束损伤相关的问题。要求是薄膜或多层膜最初必须沉积在水溶性衬底上，如单晶氯化钠。
