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A novel method for the cross-sectional TEM preparation of thin films deposited onto water-soluble substrates.

作者信息

Sáfrán G, Panine P

机构信息

Research Institute for Technical Physics, Hungarian Academy of Sciences, Budapest.

出版信息

Microsc Res Tech. 1993 Jul 1;25(4):346-9. doi: 10.1002/jemt.1070250412.

DOI:10.1002/jemt.1070250412
PMID:8358085
Abstract

A preparational method was developed solving the problem of cross-sectional TEM preparation of thin films and layer systems deposited onto water-soluble substrates. The technique is based on the replacement of the sample onto steady substrate, followed by mechanical and ion beam thinning. Cross-sectional TEM micrographs of Ag and Ag/Ag2Se layers are shown presenting the efficiency of this novel technique.

摘要

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