LEM3, CNRS UMR 7239, Arts et Métiers ParisTech, 4 rue Augustin Fresnel, 57078 Metz, France.
Ultramicroscopy. 2012 Apr;115:115-9. doi: 10.1016/j.ultramic.2012.01.018. Epub 2012 Feb 6.
A Kossel microdiffraction experimental setup has been developed inside a Scanning Electron Microscope for crystallographic orientation, strain and stress determination at a micrometer scale. This paper reports an estimation of copper and germanium specimens heating due to the electron beam bombardment. The temperature rise is calculated from precise lattice parameters measurement considering different currents induced in the specimens. The spatial resolution of the technique is then deduced.
已在扫描电子显微镜内开发出一种 Kossel 微衍射实验装置，用于在微米尺度上进行晶体取向、应变和应力测定。本文报告了由于电子束轰击而导致铜和锗样品加热的估计。考虑到样品中感应的不同电流，通过精确的晶格参数测量来计算温度升高。然后推导出该技术的空间分辨率。
