Raymond and Beverly Sackler Faculty of Exact Science, School of Physics and Astronomy, Tel Aviv University, Tel Aviv 69978, Israel.
Opt Lett. 2012 Jul 1;37(13):2733-5. doi: 10.1364/OL.37.002733.
We report the demonstration of single-mode AgCl(x)Br(1-x) strip waveguides for the mid-infrared (MIR). The waveguides were made by the deposition of AgCl(x)Br(1-x) layers on top of a Si-SiO(2) substrate, followed by photolithographic and lift-off processing. The propagation losses of 20 dB/cm were measured at λ=10.6 μm using the cut-back method. The development of these waveguides is a crucial step toward realizing AgCl(x)Br(1-x) MIR integrated optical circuits, which would be used for applications such as chemical sensing and stellar interferometry.
我们展示了用于中红外(MIR)的单模 AgCl(x)Br(1-x) 条形波导。这些波导是通过在 Si-SiO(2) 衬底上沉积 AgCl(x)Br(1-x) 层,然后进行光刻和剥离工艺制成的。使用截断法在 λ=10.6 μm 处测量到 20 dB/cm 的传播损耗。这些波导的开发是实现 AgCl(x)Br(1-x) MIR 集成光路的关键步骤,这将用于化学传感和恒星干涉测量等应用。