Mittal Vinita, Aghajani Armen, Carpenter Lewis G, Gates James C, Butement Jonathan, Smith Peter G R, Wilkinson James S, Murugan Ganapathy Senthil
Opt Lett. 2015 May 1;40(9):2016-9. doi: 10.1364/OL.40.002016.
We report the fabrication and characterization of high index contrast (Δn≈0.9) GeTe4 channel waveguides on ZnSe substrate for evanescent-field-based biosensing applications in the mid-IR spectral region. GeTe4 films were deposited by RF sputtering and characterized for their structure, composition, transparency, and dispersion. The lift-off technique was used to pattern the waveguide channels. Waveguiding from 2.5-3.7 and 6.4-7.5 μm was demonstrated, and mode intensity profile and estimated propagation losses are given for the 3.5 μm wavelength.
我们报道了在ZnSe衬底上制备高折射率对比度（Δn≈0.9）的GeTe4沟道波导，并对其进行了表征，用于中红外光谱区域基于倏逝场的生物传感应用。通过射频溅射沉积GeTe4薄膜，并对其结构、成分、透明度和色散进行了表征。采用剥离技术对波导通道进行图案化。展示了2.5 - 3.7μm和6.4 - 7.5μm的波导，并给出了3.5μm波长下的模式强度分布和估计的传播损耗。
