集成换能器的多孔硅体声波谐振器。
Porous silicon bulk acoustic wave resonator with integrated transducer.
作者信息
Aliev Gazi N, Goller Bernhard, Snow Paul A, Heinrich Helge, Yuan Biao, Aigner Robert
机构信息
Department of Physics, University of Bath, UK.
出版信息
Nanoscale Res Lett. 2012 Jul 9;7(1):378. doi: 10.1186/1556-276X-7-378.
Abstract
: We report that porous silicon acoustic Bragg reflectors and AlN-based transducers can be successfully combined and processed in a commercial solidly mounted resonator production line. The resulting device takes advantage of the unique acoustic properties of porous silicon in order to form a monolithically integrated bulk acoustic wave resonator.
摘要
我们报道，多孔硅声学布拉格反射器和基于氮化铝的换能器能够在商用的固态安装谐振器生产线中成功地进行组合和加工。所得器件利用多孔硅独特的声学特性，以形成单片集成的体声波谐振器。
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