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简单二元 ZrO2 和 HfO2 中的铁电性。

Ferroelectricity in Simple Binary ZrO2 and HfO2.

机构信息

Fraunhofer Center for Nanoelectronic Technology, Dresden, Germany.

出版信息

Nano Lett. 2012 Aug 8;12(8):4318-23. doi: 10.1021/nl302049k. Epub 2012 Jul 23.

Abstract

The transition metal oxides ZrO(2) and HfO(2) as well as their solid solution are widely researched and, like most binary oxides, are expected to exhibit centrosymmetric crystal structure and therewith linear dielectric characteristics. For this reason, those oxides, even though successfully introduced into microelectronics, were never considered to be more than simple dielectrics possessing limited functionality. Here we report the discovery of a field-driven ferroelectric phase transition in pure, sub 10 nm ZrO(2) thin films and a composition- and temperature-dependent transition to a stable ferroelectric phase in the HfO(2)-ZrO(2) mixed oxide. These unusual findings are attributed to a size-driven tetragonal to orthorhombic phase transition that in thin films, similar to the anticipated tetragonal to monoclinic transition, is lowered to room temperature. A structural investigation revealed the orthorhombic phase to be of space group Pbc2(1), whose noncentrosymmetric nature is deemed responsible for the spontaneous polarization in this novel, nanoscale ferroelectrics.

摘要

过渡金属氧化物 ZrO(2) 和 HfO(2) 及其固溶体是广泛研究的对象,与大多数二元氧化物一样,它们预计具有中心对称的晶体结构和线性介电特性。由于这个原因,这些氧化物尽管已成功引入微电子学,但它们从未被认为是除了具有有限功能的简单电介质之外的更多东西。在这里,我们报告了在纯、亚 10nm ZrO(2) 薄膜中发现的场驱动铁电相转变,以及在 HfO(2)-ZrO(2) 混合氧化物中存在组成和温度依赖性的稳定铁电相转变。这些不寻常的发现归因于尺寸驱动的四方到正交相转变,在薄膜中,类似于预期的四方到单斜相转变,该转变被降低到室温。结构研究表明正交相的空间群为 Pbc2(1),其非中心对称性质被认为是这种新型纳米级铁电体中自发极化的原因。

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