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栅长与漏源距离之比对 AlGaN/AlN/GaN 异质结构场效应晶体管中电子迁移率的影响。

Influence of the ratio of gate length to drain-to-source distance on the electron mobility in AlGaN/AlN/GaN heterostructure field-effect transistors.

机构信息

School of Physics, Shandong University, Jinan, 250100, China.

出版信息

Nanoscale Res Lett. 2012 Aug 3;7(1):434. doi: 10.1186/1556-276X-7-434.

DOI:10.1186/1556-276X-7-434
PMID:22856465
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC3477020/
Abstract

Using measured capacitance-voltage curves with different gate lengths and current-voltage characteristics at low drain-to-source voltage for the AlGaN/AlN/GaN heterostructure field-effect transistors (HFETs) of different drain-to-source distances, we found that the dominant scattering mechanism in AlGaN/AlN/GaN HFETs is determined by the ratio of gate length to drain-to-source distance. For devices with small ratio (here, less than 1/2), polarization Coulomb field scattering dominates electron mobility. However, for devices with large ratio (here, more than 1/2), longitudinal optical (LO) phonon scattering and interface roughness scattering are dominant. The reason is closely related to polarization Coulomb field scattering.

摘要

利用不同栅长的测量电容-电压曲线和低漏源电压下的电流-电压特性,对不同漏源距离的 AlGaN/AlN/GaN 异质结构场效应晶体管(HFET)进行研究,我们发现,AlGaN/AlN/GaN HFET 中的主要散射机制由栅长与漏源距离的比值决定。对于比值较小(小于 1/2)的器件,极化库仑场散射主导电子迁移率。然而,对于比值较大(大于 1/2)的器件,长光学(LO)声子散射和界面粗糙度散射占主导地位。这一现象与极化库仑场散射密切相关。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2026/3477020/c8d5e5f59617/1556-276X-7-434-4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2026/3477020/6db3149a7752/1556-276X-7-434-1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2026/3477020/01c119ead5d9/1556-276X-7-434-2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2026/3477020/36df972c61a8/1556-276X-7-434-3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2026/3477020/c8d5e5f59617/1556-276X-7-434-4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2026/3477020/6db3149a7752/1556-276X-7-434-1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2026/3477020/01c119ead5d9/1556-276X-7-434-2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2026/3477020/36df972c61a8/1556-276X-7-434-3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2026/3477020/c8d5e5f59617/1556-276X-7-434-4.jpg

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引用本文的文献

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Effect of Different Gate Lengths on Polarization Coulomb Field Scattering Potential in AlGaN/GaN Heterostructure Field-Effect Transistors.不同栅长对AlGaN/GaN异质结场效应晶体管中极化库仑场散射势的影响
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2
Influence of Surface Passivation on AlN Barrier Stress and Scattering Mechanism in Ultra-thin AlN/GaN Heterostructure Field-Effect Transistors.表面钝化对超薄AlN/GaN异质结构场效应晶体管中AlN势垒应力及散射机制的影响
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3
Band offsets of non-polar A-plane GaN/AlN and AlN/GaN heterostructures measured by X-ray photoemission spectroscopy.
通过X射线光电子能谱测量的非极性A面GaN/AlN和AlN/GaN异质结构的带隙偏移。
Nanoscale Res Lett. 2014 Sep 4;9(1):470. doi: 10.1186/1556-276X-9-470. eCollection 2014.