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双调制器宽带红外穆勒矩阵椭偏测量法。

Dual-modulator broadband infrared Mueller matrix ellipsometry.

作者信息

Cross Liam J K, Hore Dennis K

机构信息

Department of Chemistry, University of Victoria, Victoria, British Columbia, Canada.

出版信息

Appl Opt. 2012 Jul 20;51(21):5100-10. doi: 10.1364/AO.51.005100.

Abstract

A broadband mid-infrared Mueller matrix ellipsometer is described based on two photoelastic modulators and a step-scan interferometer. The data are analyzed using a combination hardware-software double Fourier transformation. Obtaining spectra of the Mueller matrix elements requires that the infrared wavelength-dependent retardation amplitude of the modulators be known through calibration and subsequently incorporated into the data processing. The spectroscopic capability of the instrument is demonstrated in transmission and reflection geometries by the measured Mueller matrices of air, an anisotropic quartz crystal, and the ZnSe-water interface, each from 2500-4000 cm(-1).

摘要

介绍了一种基于两个光弹调制器和步进扫描干涉仪的宽带中红外穆勒矩阵椭偏仪。使用硬件 - 软件双傅里叶变换对数据进行分析。要获得穆勒矩阵元素的光谱,需要通过校准知道调制器与红外波长相关的延迟幅度,并随后将其纳入数据处理中。通过测量空气、各向异性石英晶体和ZnSe - 水界面在2500 - 4000 cm(-1)范围内的穆勒矩阵,在透射和反射几何结构中展示了该仪器的光谱能力。

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