Electronic Materials Research Center, Korea Institute of Science and Technology, Seoul 136-791, Republic of Korea.
Sci Rep. 2012;2:588. doi: 10.1038/srep00588. Epub 2012 Aug 17.
One of the top design priorities for semiconductor chemical sensors is developing simple, low-cost, sensitive and reliable sensors to be built in handheld devices. However, the need to implement heating elements in sensor devices, and the resulting high power consumption, remains a major obstacle for the realization of miniaturized and integrated chemoresistive thin film sensors based on metal oxides. Here we demonstrate structurally simple but extremely efficient all oxide chemoresistive sensors with ~90% transmittance at visible wavelengths. Highly effective self-activation in anisotropically self-assembled nanocolumnar tungsten oxide thin films on glass substrate with indium-tin oxide electrodes enables ultrahigh response to nitrogen dioxide and volatile organic compounds with detection limits down to parts per trillion levels and power consumption less than 0.2 microwatts. Beyond the sensing performance, high transparency at visible wavelengths creates opportunities for their use in transparent electronic circuitry and optoelectronic devices with avenues for further functional convergence.
半导体化学传感器的首要设计目标之一是开发简单、低成本、灵敏和可靠的传感器,以便集成到手持设备中。然而,在传感器设备中实现加热元件以及由此产生的高功耗,仍然是基于金属氧化物的小型化和集成型电阻式薄膜化学传感器实现的主要障碍。在这里,我们展示了结构简单但效率极高的全氧化物电阻式化学传感器,其在可见光波长下的透过率约为 90%。在具有铟锡氧化物电极的玻璃衬底上各向异性自组装的纳米柱状氧化钨薄膜中,实现了非常有效的自激活,从而对二氧化氮和挥发性有机化合物具有超高的响应,检测限低至万亿分之几的水平,功耗小于 0.2 微瓦。除了传感性能之外,在可见光波长下的高透明度为其在透明电子电路和光电设备中的应用创造了机会,为进一步的功能融合开辟了道路。