Ningbo Institute of Material Technology and Engineering, Chinese Academy of Science, No, 519, Zhuangshi Road, Zhenhai District, Ningbo, 315201, People's Republic of China.
Nanoscale Res Lett. 2012 Aug 29;7(1):481. doi: 10.1186/1556-276X-7-481.
Aluminum-doped zinc oxide ceramics with yttria doping (AZO:Y) ranging from 0 to 0.2 wt.% were fabricated by pressureless sintering yttria-modified nanoparticles in air at 1,300°C. Scanning electron microscopy, energy-dispersive X-ray spectroscopy, X-ray diffraction analysis, a physical property measurement system, and a densimeter were employed to characterize the precursor nanoparticles and the sintered AZO ceramics. It was shown that a small amount of yttria doping can remarkably retard the growth of the as-received precursor nanoparticles, further improve the microstructure, refine the grain size, and enhance the density for the sintered ceramic. Increasing the yttria doping to 0.2 wt.%, the AZO:Y nanoparticles synthetized by a coprecipitation process have a nearly sphere-shaped morphology and a mean particle diameter of 15.1 nm. Using the same amount of yttria, a fully dense AZO ceramic (99.98% of theoretical density) with a grain size of 2.2 μm and a bulk resistivity of 4.6 × 10-3 Ω·cm can be achieved. This kind of AZO:Y ceramic has a potential to be used as a high-quality sputtering target to deposit ZnO-based transparent conductive films with better optical and electrical properties.
采用常压烧结法，在空气中于 1300°C 烧结掺钇氧化铟锌（AZO:Y）陶瓷，其中氧化钇的掺杂量范围为 0 至 0.2 重量%。利用扫描电子显微镜、能量色散 X 射线光谱、X 射线衍射分析、物理性能测量系统和密度计对前驱体纳米粒子和烧结的 AZO 陶瓷进行了表征。结果表明，少量的钇掺杂可以显著减缓所接收的前驱体纳米粒子的生长，进一步改善微观结构、细化晶粒尺寸并提高烧结陶瓷的密度。当氧化钇掺杂量增加到 0.2 重量%时，通过共沉淀法合成的 AZO:Y 纳米粒子具有近球形形貌，平均粒径为 15.1nm。使用相同量的钇，可以获得完全致密的 AZO 陶瓷（理论密度的 99.98%），晶粒尺寸为 2.2μm，体电阻率为 4.6×10-3Ω·cm。这种 AZO:Y 陶瓷有望用作高质量的溅射靶材，以沉积具有更好光电性能的 ZnO 基透明导电薄膜。
