Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Hsinchu 30013, Taiwan.
Sensors (Basel). 2012;12(6):7157-68. doi: 10.3390/s120607157. Epub 2012 May 29.
An indium nitride (InN) gas sensor of 10 nm in thickness has achieved detection limit of 0.4 ppm acetone. The sensor has a size of 1 mm by 2.5 mm, while its sensing area is 0.25 mm by 2 mm. Detection of such a low acetone concentration in exhaled breath could enable early diagnosis of diabetes for portable physiological applications. The ultrathin InN epilayer extensively enhances sensing sensitivity due to its strong electron accumulation on roughly 5-10 nm deep layers from the surface. Platinum as catalyst can increase output current signals by 2.5-fold (94 vs. 37.5 μA) as well as reduce response time by 8.4-fold (150 vs. 1,260 s) in comparison with bare InN. More, the effect of 3% oxygen consumption due to breath inhalation and exhalation on 2.4 ppm acetone gas detection was investigated, indicating that such an acetone concentration can be analyzed in air.
厚度为 10nm 的氮化铟（InN）气体传感器实现了对 0.4ppm 丙酮的检测极限。该传感器尺寸为 1mm×2.5mm，其传感面积为 0.25mm×2mm。对呼气中如此低浓度的丙酮进行检测，可能为便携式生理应用实现糖尿病的早期诊断。由于表面以下约 5-10nm 深处的电子积累，超薄 InN 外延层极大地提高了传感灵敏度。与裸 InN 相比，催化剂铂可将输出电流信号提高 2.5 倍（94 对 37.5μA），并将响应时间缩短 8.4 倍（150 对 1260s）。此外，还研究了呼吸引起的 3%氧气消耗对 2.4ppm 丙酮气体检测的影响，表明可以在空气中分析这种浓度的丙酮。
