Zhao Zhujie, Lei Cheng, Liang Ting, Zhang Junna, Liu Yuqiao, Ghaffar Abdul, Xiong Jijun
State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
State Key Laboratory of Geomechanics and Geotechnical Engineering, Institute of Rock and Soil Mechanics, Chinese Academy of Sciences, Wuhan 430071, China.
Micromachines (Basel). 2023 Mar 6;14(3):608. doi: 10.3390/mi14030608.
Aimed at the problems of a large equipment size, long time and high price of environmental VOC gas detection, the FAIMS-VOC gas sensor was designed and prepared according to the principle that the ionization energy of the common VOC gas is less than 10.6 eV. The sensor is small in size, fast in detection, low in power consumption, and can work continuously. The sensor was fabricated through the MEMS process, a specific process which included photolithography, etching, anodic bonding, etc. The sensor is 5160 μm long, 5300 μm wide and 800 μm high. We built a test system to detect two typical VOC gases: isobutylene and acetone. The results show that in the detection of isobutylene gas and acetone gas, the sensor voltage value changes with the change of gas concentration. The linearity of testing isobutylene is 0.961, and the linearity of testing acetone is 0.987. When the isobutylene gas concentration is 50 ppm, the response time is 8 s and the recovery time is 6 s; when the acetone gas concentration is 50 ppm, the response time is 9 s and the recovery time is 10 s. In addition, the sensor demonstrates good repeatability and stability, which are conducive to the detection of VOCs in the environment.
针对环境中挥发性有机化合物（VOC）气体检测存在设备体积大、检测时间长、价格高的问题，基于常见VOC气体电离能小于10.6 eV的原理，设计并制备了FAIMS-VOC气体传感器。该传感器体积小、检测速度快、功耗低且能连续工作。传感器通过微机电系统（MEMS）工艺制造，该工艺包括光刻、蚀刻、阳极键合等特定工艺。传感器长5160μm、宽5300μm、高800μm。我们搭建了一个测试系统来检测两种典型的VOC气体：异丁烯和丙酮。结果表明，在检测异丁烯气体和丙酮气体时，传感器电压值随气体浓度的变化而变化。检测异丁烯的线性度为0.961，检测丙酮的线性度为0.987。当异丁烯气体浓度为50 ppm时，响应时间为8 s，恢复时间为6 s；当丙酮气体浓度为50 ppm时，响应时间为9 s，恢复时间为10 s。此外，该传感器具有良好的重复性和稳定性，有利于环境中VOCs的检测。
