Maenaka Human-Sensing Fusion Project, JST, Shosha 2167, Himeji, Hyogo, Japan.
Sensors (Basel). 2012;12(6):8026-38. doi: 10.3390/s120608026. Epub 2012 Jun 11.
A novel gas-sealed capacitive pressure sensor with a temperature compensation structure is reported. The pressure sensor is sealed by Au-Au diffusion bonding under a nitrogen ambient with a pressure of 100 kPa and integrated with a platinum resistor-based temperature sensor for human activity monitoring applications. The capacitance-pressure and capacitance-temperature characteristics of the gas-sealed capacitive pressure sensor without temperature compensation structure are calculated. It is found by simulation that a ring-shaped structure on the diaphragm of the pressure sensor can mechanically suppress the thermal expansion effect of the sealed gas in the cavity. Pressure sensors without/with temperature compensation structures are fabricated and measured. Through measured results, it is verified that the calculation model is accurate. Using the compensation structures with a 900 μm inner radius, the measured temperature coefficient is much reduced as compared to that of the pressure sensor without compensation. The sensitivities of the pressure sensor before and after compensation are almost the same in the pressure range from 80 kPa to 100 kPa.
一种带有温度补偿结构的新型气密封电容压力传感器被报道。该压力传感器在氮气环境中通过 Au-Au 扩散键合进行密封，压力为 100 kPa，并与基于铂电阻的温度传感器集成，用于人体活动监测应用。计算了不带温度补偿结构的气密封电容压力传感器的电容-压力和电容-温度特性。通过模拟发现，压力传感器膜片上的环形结构可以机械抑制腔体内密封气体的热膨胀效应。制造并测量了不带/带温度补偿结构的压力传感器。通过测量结果验证了计算模型的准确性。使用内半径为 900 μm 的补偿结构，与不带补偿的压力传感器相比，测量的温度系数大大降低。在 80 kPa 到 100 kPa 的压力范围内，补偿前后压力传感器的灵敏度几乎相同。
