Department of Engineering Science and Ocean Engineering, National Taiwan University, Taipei 10617, Taiwan.
Sensors (Basel). 2013 Apr 25;13(5):5478-92. doi: 10.3390/s130505478.
This paper presents the development of tactile sensors using the sol-gel process to deposit a PZT thin-film from 250 nm to 1 μm on a flexible stainless steel substrate. The PZT thin-film tactile sensor can be used to measure human pulses from several areas, including carotid, brachial, finger, ankle, radial artery, and the apical region. Flexible PZT tactile sensors can overcome the diverse topology of various human regions and sense the corresponding signals from human bodies. The measured arterial pulse waveform can be used to diagnose hypertension and cardiac failure in patients. The proposed sensors have several advantages, such as flexibility, reliability, high strain, low cost, simple fabrication, and low temperature processing. The PZT thin-film deposition process includes a pyrolysis process at 150 °C/500 °C for 10/5 min, followed by an annealing process at 650 °C for 10 min. Finally, the consistent pulse wave velocity (PWV) was demonstrated based on human pulse measurements from apical to radial, brachial to radial, and radial to ankle. It is characterized that the sensitivity of our PZT-based tactile sensor was approximately 0.798 mV/g.
本文介绍了使用 sol-gel 工艺在柔性不锈钢基底上沉积厚度为 250nm 至 1μm 的 PZT 薄膜的触觉传感器的开发。PZT 薄膜触觉传感器可用于测量人体多个部位的脉搏，包括颈动脉、肱动脉、手指、脚踝、桡动脉和心尖区域。柔性 PZT 触觉传感器可以克服人体各部位的不同拓扑结构，并感知人体的相应信号。所测量的动脉脉搏波形可用于诊断患者的高血压和心力衰竭。所提出的传感器具有几个优点，如灵活性、可靠性、高应变、低成本、简单的制造工艺和低温处理。PZT 薄膜的沉积过程包括在 150°C/500°C 下进行 10/5 分钟的热解过程，然后在 650°C 下进行 10 分钟的退火过程。最后，基于从心尖到桡动脉、肱动脉到桡动脉和桡动脉到脚踝的人体脉搏测量，证明了一致的脉搏波速度（PWV）。特征在于，我们基于 PZT 的触觉传感器的灵敏度约为 0.798 mV/g。
