Chang Ching-Yuan, Ma Chien-Ching
National Taiwan University, No. 1, Sec. 4, Roosevelt Road, Taipei 10617, Taiwan.
Rev Sci Instrum. 2012 Sep;83(9):095004. doi: 10.1063/1.4752026.
This study proposes a frequency-sweeping function of electronic speckle pattern interferometry, based on standard deviation in the temporal domain. The proposed method facilities the measurement of resonant vibration, and provides stable and clear interference fringes. This study investigated the third in-plane eigenmode of a thin piezoelectric plate, using the finite element method and an impedance analyzer to verify the dynamic response obtained using the proposed method. We analyzed the vibration amplitude of interference fringes to obtain quantitative results on the sub-micron scale. The close agreement between the experimental results demonstrates the effectiveness of using the frequency-sweeping function to obtain the resonant states and provides an accurate prediction of resonance. Furthermore, statistical analysis of interference fringes obtained using the subtractive, mean, and the standard deviation method is performed. The result shows that the standard deviation method provides higher quality and stability of fringe pattern.
本研究基于时域标准差提出了一种电子散斑干涉术的扫频功能。所提出的方法有助于共振振动的测量，并提供稳定且清晰的干涉条纹。本研究使用有限元方法和阻抗分析仪研究了薄压电板的第三面内本征模式，以验证使用所提出的方法获得的动态响应。我们分析了干涉条纹的振动幅度，以获得亚微米尺度上的定量结果。实验结果之间的密切一致性证明了使用扫频功能获得共振状态的有效性，并提供了准确的共振预测。此外，还对使用减法、均值和标准差方法获得的干涉条纹进行了统计分析。结果表明，标准差方法提供了更高质量和稳定性的条纹图案。
