Chang Ching-Yuan, Lin Shih-Hao, Ma Chien-Ching
Mechanical Engineering Department, National Taiwan University, No. 1, Sec. 4, Roosevelt Road, Taipei 10617, Taiwan.
Appl Opt. 2012 Aug 20;51(24):5773-9. doi: 10.1364/AO.51.005773.
This study proposes an algorithm based on the standard deviation in the temporal domain to remove influences from background noise and ambient disturbance and enhance the quality of images obtained using interferometric technology. From measurements of the first ten in-plane resonant frequencies and mode shapes of vibrating zirconate titanate (PZT) laminates, we investigated the resonant characteristics in both the U and V directions. The resulting interference fringes were used to quantify the vibration amplitude of PZT plates on a submicron scale. The resonant frequencies obtained using the proposed method are in excellent agreement with those obtained using the finite element method and an impedance analyzer.
本研究提出了一种基于时域标准差的算法，以消除背景噪声和环境干扰的影响，并提高使用干涉测量技术获得的图像质量。通过对振动锆钛酸铅（PZT）层压板的前十个面内共振频率和振型的测量，我们研究了U和V方向的共振特性。所得干涉条纹用于在亚微米尺度上量化PZT板的振动幅度。使用所提出的方法获得的共振频率与使用有限元方法和阻抗分析仪获得的共振频率非常吻合。
