IEEE Trans Ultrason Ferroelectr Freq Control. 2013 Jul;60(7):1412-23. doi: 10.1109/TUFFC.2013.2713.
Interferometry provides a high degree of accuracy in the measurement of sub-micrometer deformations; however, the noise associated with experimental measurement undermines the integrity of interference fringes. This study proposes the use of standard deviation in the temporal domain to improve the image quality of patterns obtained from temporal speckle pattern interferometry. The proposed method combines the advantages of both mean and subtractive methods to remove background noise and ambient disturbance simultaneously, resulting in high-resolution images of excellent quality. The out-of-plane vibration of a thin piezoelectric plate is the main focus of this study, providing information useful to the development of energy harvesters. First, ten resonant states were measured using the proposed method, and both mode shape and resonant frequency were investigated. We then rebuilt the phase distribution of the first resonant mode based on the clear interference patterns obtained using the proposed method. This revealed instantaneous deformations in the dynamic characteristics of the resonant state. The proposed method also provides a frequency-sweeping function, facilitating its practical application in the precise measurement of resonant frequency. In addition, the mode shapes and resonant frequencies obtained using the proposed method were recorded and compared with results obtained using finite element method and laser Doppler vibrometery, which demonstrated close agreement.
干涉测量法在亚微米变形测量中具有很高的精度;然而,与实验测量相关的噪声会破坏干涉条纹的完整性。本研究提出使用时域中的标准差来提高从时间散斑图案干涉测量法获得的图案的图像质量。所提出的方法结合了均值法和减法法的优点,同时去除背景噪声和环境干扰,从而得到高质量的高分辨率图像。薄压电板的面外振动是本研究的主要关注点,为能量收集器的开发提供有用信息。首先,使用所提出的方法测量了十个共振状态,并研究了振型和共振频率。然后,基于使用所提出的方法获得的清晰干涉图案重建了第一共振模式的相位分布。这揭示了共振状态动态特性中的瞬时变形。所提出的方法还提供扫频功能,便于其在共振频率精确测量中的实际应用。此外,记录了使用所提出的方法获得的振型和共振频率,并与使用有限元法和激光多普勒振动测量法获得的结果进行比较,结果显示吻合度很高。