Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, PR China.
ACS Appl Mater Interfaces. 2012 Oct 24;4(10):5678-83. doi: 10.1021/am301603e. Epub 2012 Oct 10.
We report a facile nanofabrication method, one-step hard anodizing and etching peeling (OS-HA-EP) of aluminum foils followed by multistep mild anodizing and etching pore-widening (MS-MA-EW), for the controllable tailoring of hexagonally packed three-dimensional alumina taper-nanopores. Their profiles can be precisely tailored by the synergistic control of anodizing time, etching time and cyclic times at the MS-MA-EW stage, exemplified by linear cones, whorl-embedded cones, funnels, pencils, parabolas, and trumpets. Meantime, their periods can also be modulated in the range of 70-370 nm by choosing matched anodizing electrolytes (e.g., H(2)C(2)O(4), H(2)SO(4), H(2)C(2)O(4)-H(2)SO(4), and H(2)C(2)O(4)-C(2)H(5)OH mixture) and anodizing voltages at the OS-HA-EP stage. We also demonstrated that the long-range ordering of nanopits and the peak voltage of stable self-ordered HA, which are unachievable in a single H(2)C(2)O(4) electrolyte system, can be effectively tuned by simply adding tiny quantity of H(2)SO(4) and C(2)H(5)OH to keep an appropriate HA current density, respectively. This method of using the combination of simple pure chemical nanofabrication technologies is very facile and efficient in realizing the controllable tailoring of large-area alumina membranes containing self-ordered taper-nanopores. Our work opens a door for exploring the novel physical and chemical properties of different materials of nanotaper arrays.
我们报告了一种简便的纳米制造方法,即一步硬阳极氧化和蚀刻剥离(OS-HA-EP)的铝箔,然后进行多步温和阳极氧化和蚀刻扩孔(MS-MA-EW),以可控的方式修整六边形排列的三维氧化铝锥形纳米孔。通过在 MS-MA-EW 阶段协同控制阳极氧化时间、蚀刻时间和循环次数,可以精确地修整它们的轮廓,例如线性锥形、螺旋嵌入锥形、漏斗、铅笔、抛物线和喇叭。同时,通过选择匹配的阳极氧化电解液(例如 H(2)C(2)O(4)、H(2)SO(4)、H(2)C(2)O(4)-H(2)SO(4) 和 H(2)C(2)O(4)-C(2)H(5)OH 混合物)和 OS-HA-EP 阶段的阳极氧化电压,也可以调节它们的周期在 70-370nm 范围内。我们还证明,在单个 H(2)C(2)O(4)电解质系统中无法实现的纳米坑的长程有序和稳定自有序 HA 的峰值电压,可以通过简单地添加少量 H(2)SO(4)和 C(2)H(5)OH 来有效地调节,以分别保持适当的 HA 电流密度。这种使用简单的纯化学纳米制造技术组合的方法在实现大面积含有自有序锥形纳米孔的氧化铝膜的可控修整方面非常简便和高效。我们的工作为探索不同材料的纳米锥形阵列的新物理和化学性质开辟了道路。