Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan.
Sensors (Basel). 2012;12(8):10034-41. doi: 10.3390/s120810034. Epub 2012 Jul 25.
This work demonstrates a highly sensitive pressure sensor that was fabricated using carbon microcoils (CMCs) and polydimethylsiloxane (PDMS). CMCs were grown by chemical vapor deposition using various ratios of Fe-Sn catalytic solution. The pressure sensor has a sandwiched structure, in which the as-grown CMCs were inserted between two PDMS layers. The pressure sensor exhibits piezo-resistivity changes in response to mechanical loading using a load cell system. The yields of the growth of CMCs at a catalyst proportion of Fe:Sn = 95:5 reach 95%. Experimental results show that the sensor achieves a high sensitivity of 0.93%/kPa from the CMC yield of 95%. The sensitivity of the pressure sensor increases with increasing yield of CMCs. The demonstrated pressure sensor shows the advantage of high sensitivity and is suitable for mass production.
这项工作展示了一种使用碳微线圈（CMCs）和聚二甲基硅氧烷（PDMS）制造的高灵敏度压力传感器。通过使用不同比例的 Fe-Sn 催化溶液的化学气相沉积来生长 CMCs。压力传感器具有夹层结构，其中生长的 CMCs 被插入两个 PDMS 层之间。压力传感器使用负载细胞系统响应机械加载显示出压阻变化。在催化剂比例为 Fe：Sn = 95：5 时，CMCs 的生长产率达到 95%。实验结果表明，传感器从 CMC 产率为 95%实现了 0.93%/kPa 的高灵敏度。压力传感器的灵敏度随 CMCs 产率的增加而增加。所展示的压力传感器具有高灵敏度的优势，适合大规模生产。
