Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA.
Science. 2012 Dec 7;338(6112):1327-30. doi: 10.1126/science.1228925.
A self-terminating rapid electrodeposition process for controlled growth of platinum (Pt) monolayer films from a K(2)PtCl(4)-NaCl electrolyte has been developed that is tantamount to wet atomic layer deposition. Despite the deposition overpotential being in excess of 1 volt, Pt deposition was quenched at potentials just negative of proton reduction by an alteration of the double-layer structure induced by a saturated surface coverage of underpotential deposited H (H(upd)). The surface was reactivated for further Pt deposition by stepping the potential to more positive values, where H(upd) is oxidized and fresh sites for the adsorption of PtCl(4)(2-) become available. Periodic pulsing of the potential enables sequential deposition of two-dimensional Pt layers to fabricate films of desired thickness, relevant to a range of advanced technologies.
已经开发出一种自终止快速电沉积工艺,可从 K(2)PtCl(4)-NaCl 电解质中控制生长铂 (Pt) 单层薄膜,这相当于湿原子层沉积。尽管沉积过电位超过 1 伏特,但通过在欠电位沉积 H(H(upd))饱和表面覆盖下引起的双电层结构的改变,Pt 的沉积在仅比质子还原电位负的电势下被猝灭。通过将电势步移到更正的值,表面重新被激活以进行进一步的 Pt 沉积,其中 H(upd)被氧化并且新的 PtCl(4)(2-)吸附位点变得可用。周期性脉冲电势可实现二维 Pt 层的顺序沉积,从而制造出具有所需厚度的薄膜,这与一系列先进技术相关。