具有叉指电极的侧向场激励（yxl）88° LiTaO3 体声波传感器。
A lateral field excited (yxl)88° LiTaO3 bulk acoustic wave sensor with interdigital electrodes.
机构信息
Piezoelectric Device Laboratory, School of Mechanical Engineering & Mechanics, Ningbo University, Ningbo 315211, China.
出版信息
Ultrasonics. 2013 Mar;53(3):648-51. doi: 10.1016/j.ultras.2012.12.013. Epub 2013 Jan 9.
In this work, to improve the sensitivity of lateral field excited (LFE) sensors to changes of liquid conductivity, LFE bulk acoustic wave sensors with interdigital electrodes are investigated. LFE bulk acoustic wave on thickness-shear mode is excited successfully by interdigital electrodes on (yxl)88° LiTaO(3) and applied in liquid-phase sensor. The electric field direction of LFE (yxl)88° LiTaO(3) plates is determined. Based on this, several LFE bulk acoustic wave sensors with interdigital electrodes are designed and fabricated to increase the sensitivity of LiTaO(3) LFE sensors. The results show that the (yxl)88° LiTaO(3) LFE sensor with interdigital electrodes is 10.9 times and 2.1 times more sensitive to changes in liquid conductivity compared to traditional LFE devices with single gap circular electrodes and Archimedes spiral electrodes, respectively. The results are important for investigating high-sensitivity LFE bulk acoustic wave sensors by using LiTaO(3) crystal.
在这项工作中，为了提高侧向场激发（LFE）传感器对液体电导率变化的灵敏度，研究了具有叉指电极的 LFE 体声波传感器。通过在（yxl）88° LiTaO（3）上的叉指电极成功激发了厚度剪切模式的 LFE 体声波，并将其应用于液相传感器中。确定了 LFE（yxl）88° LiTaO（3）板的电场方向。在此基础上，设计并制作了几种具有叉指电极的 LFE 体声波传感器，以提高 LiTaO（3）LFE 传感器的灵敏度。结果表明，与传统的具有单间隙圆形电极和阿基米德螺旋电极的 LFE 器件相比，具有叉指电极的（yxl）88° LiTaO（3）LFE 传感器对液体电导率变化的灵敏度分别提高了 10.9 倍和 2.1 倍。这些结果对于利用 LiTaO（3）晶体研究高灵敏度的 LFE 体声波传感器具有重要意义。
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