Ma Tingfeng, Zhang Qiong, Yu Fapeng, Xie Chao, Wang Ji, Du Jianke, Huang Bin, Huang Jiahan, Zhang Chao
Piezoelectric Device Laboratory, School of Mechanical Engineering & Mechanics, Ningbo University, Ningbo 315211, China.
State Key Laboratory of Crystal Material, Shandong University, Jinan 250100, China.
J Acoust Soc Am. 2017 Aug;142(2):641. doi: 10.1121/1.4996001.
The double-mode lateral-field-excitation (LFE) bulk acoustic wave characteristics of CaTaGaSiO (CTGS) crystals are investigated. It is found that LFE devices based on (yxl)-57° CTGS crystals can work on both pure-LFE and pseudo-LFE modes when the driving electric field direction is normal to the crystallographic x axis of the piezoelectric substrate. Several double-mode LFE bulk acoustic wave devices based on CTGS crystals are designed and tested. The experimental results conform to the theoretical prediction well. Being able to operate in pure-LFE and pseudo-LFE modes, the double-mode LFE sensors show high sensitivity to both mechanical and electrical property changes of analytes. The results provide the crystal cut for double-mode LFE sensors, which is a critical basis of designing high-performance chemical and biological sensors by using double-mode LFE devices.
研究了CaTaGaSiO（CTGS）晶体的双模横向场激发（LFE）体声波特性。研究发现，当驱动电场方向垂直于压电衬底的晶体学x轴时，基于（yxl）-57°CTGS晶体的LFE器件可以在纯LFE和伪LFE模式下工作。设计并测试了几种基于CTGS晶体的双模LFE体声波器件。实验结果与理论预测吻合良好。双模LFE传感器能够在纯LFE和伪LFE模式下工作，对分析物的机械和电学性质变化均表现出高灵敏度。这些结果为双模LFE传感器提供了晶体切割方式，这是利用双模LFE器件设计高性能化学和生物传感器的关键基础。
