基于不同工作模式的拉格朗日体切向场激励体声波传感器。

Lateral-field-excited bulk acoustic wave sensors on langasite working on different operational modes.

出版信息

IEEE Trans Ultrason Ferroelectr Freq Control. 2013 Apr;60(4):864-7. doi: 10.1109/TUFFC.2013.2637.

DOI:10.1109/TUFFC.2013.2637

Abstract

Lateral-field-excited (LFE) bulk acoustic wave sensors on langasite working on different operational modes are investigated and compared. Langasite LFE sensors on pure-LFE mode and pseudo-LFE mode are designed and fabricated. The sensitivities of the devices to changes in liquid electrical properties (e.g., conductivity or permittivity) and micro-mass changes on their surfaces were tested and compared. The experimental results show that compared with langasite pure-LFE devices, langasite pseudo-LFE devices have superior sensitivities to both liquid conductivity and liquid permittivity changes. For the micro-mass changes, the pure- LFE devices showed high sensitivity, whereas the pseudo-LFE devices do not, because they cannot resonate in air. On this basis, the physical interpretation of these results is discussed.

摘要

研究并比较了朗钛石体上基于不同工作模式的横向场激励（LFE）体声波传感器。设计并制作了基于纯 LFE 模式和伪 LFE 模式的朗钛石 LFE 传感器。测试并比较了器件对液体电特性（例如电导率或介电常数）变化和表面微质量变化的灵敏度。实验结果表明，与朗钛石纯 LFE 器件相比，朗钛石伪 LFE 器件对液体电导率和介电常数变化具有更高的灵敏度。对于微质量变化，纯 LFE 器件表现出高灵敏度，而伪 LFE 器件则没有，因为它们在空气中无法共振。在此基础上，对这些结果进行了物理解释。