Department of Chemistry and Biochemistry and California NanoSystems Institute, University of California, Los Angeles, Los Angeles, California 90095, USA.
Nat Commun. 2013;4:1475. doi: 10.1038/ncomms2446.
The rapid development of miniaturized electronic devices has increased the demand for compact on-chip energy storage. Microscale supercapacitors have great potential to complement or replace batteries and electrolytic capacitors in a variety of applications. However, conventional micro-fabrication techniques have proven to be cumbersome in building cost-effective micro-devices, thus limiting their widespread application. Here we demonstrate a scalable fabrication of graphene micro-supercapacitors over large areas by direct laser writing on graphite oxide films using a standard LightScribe DVD burner. More than 100 micro-supercapacitors can be produced on a single disc in 30 min or less. The devices are built on flexible substrates for flexible electronics and on-chip uses that can be integrated with MEMS or CMOS in a single chip. Remarkably, miniaturizing the devices to the microscale results in enhanced charge-storage capacity and rate capability. These micro-supercapacitors demonstrate a power density of ~200 W cm-3, which is among the highest values achieved for any supercapacitor.
微型化电子设备的快速发展增加了对片上紧凑型储能的需求。微尺度超级电容器在各种应用中具有补充或替代电池和电解电容器的巨大潜力。然而，传统的微制造技术在构建具有成本效益的微器件方面被证明是繁琐的，从而限制了它们的广泛应用。在这里，我们通过使用标准的 LightScribe DVD 刻录机在氧化石墨膜上直接激光写入展示了一种可扩展的石墨烯微超级电容器的制造方法。在 30 分钟或更短的时间内，单个光盘上可以生产 100 多个微超级电容器。这些器件构建在柔性基板上，用于柔性电子和片上应用，可以与 MEMS 或 CMOS 集成在单个芯片上。值得注意的是，将器件小型化到微尺度会导致电荷存储容量和倍率性能的提高。这些微超级电容器的功率密度约为 200 W cm-3，这是任何超级电容器中最高的值之一。
