Área académica de Computación, ICBI, Universidad Autónoma del Estado de Hidalgo, Mineral de la Reforma, Hidalgo, Mexico.
Sensors (Basel). 2013 Mar 12;13(3):3432-44. doi: 10.3390/s130303432.
Chromium and ruthenium-doped zinc oxide (ZnO:Cr) and (ZnO:Ru) thin solid films were deposited on soda-lime glass substrates by the sol-gel dip-coating method. A 0.6 M solution of zinc acetate dihydrate dissolved in 2-methoxyethanol and monoethanolamine was used as basic solution. Chromium (III) acetylacetonate and Ruthenium (III) trichloride were used as doping sources. The Ru incorporation and its distribution profile into the films were proved by the SIMS technique. The morphology and structure of the films were studied by SEM microscopy and X-ray diffraction measurements, respectively. The SEM images show porous surfaces covered by small grains with different grain size, depending on the doping element, and the immersions number into the doping solutions. The sensing properties of ZnO:Cr and ZnO:Ru films in a propane (C3H8) atmosphere, as a function of the immersions number in the doping solution, have been studied in the present work. The highest sensitivity values were obtained for films doped from five immersions, 5.8 and 900, for ZnO:Cr and ZnO:Ru films, respectively. In order to evidence the catalytic effect of the chromium (Cr) and ruthenium (Ru), the sensing characteristics of undoped ZnO films are reported as well.
掺铬和钌的氧化锌（ZnO:Cr）和（ZnO:Ru）薄膜通过溶胶-凝胶浸涂法沉积在钠钙玻璃衬底上。基本溶液是溶解在 2-甲氧基乙醇和单乙醇胺中的 0.6 M 乙酸锌二水合物溶液。三价铬（III）乙酰丙酮和三氯化钌（III）被用作掺杂源。SIMS 技术证明了 Ru 的掺入及其在薄膜中的分布情况。通过 SEM 显微镜和 X 射线衍射测量分别研究了薄膜的形貌和结构。SEM 图像显示，表面覆盖着具有不同粒径的小颗粒的多孔表面，这取决于掺杂元素和掺杂溶液的浸泡次数。本工作研究了 ZnO:Cr 和 ZnO:Ru 薄膜在丙烷（C3H8）气氛中的传感性能，作为在掺杂溶液中浸泡次数的函数。对于分别从五次和五次浸泡中掺杂的 ZnO:Cr 和 ZnO:Ru 薄膜，获得了最高的灵敏度值，分别为 5.8 和 900。为了证明铬（Cr）和钌（Ru）的催化作用，还报告了未掺杂 ZnO 薄膜的传感特性。
