Improvement of the precision of lattice parameter determination by nano-beam electron diffraction.

A highly precise determination of lattice parameters using higher-order Laue zone (HOLZ) reflections observed in nano-beam electron diffraction is presented. The introduction of more than 40 HOLZ reflections, whose positions are corrected by considering the aberration of the electron optics and are determined with an accuracy of 0.04 nm⁻¹, allows us to achieve a remarkable high precision of a 0.02% error, which is four times higher than the precision without HOLZ reflections.