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氮化铟镓/氮化镓多量子阱纳米线的外延横向生长研究

Investigation on epitaxial lateral overgrowth of InGaN/GaN multi-quantum-well nanowires.

作者信息

Yin Yao, Sun Huabin, Tang Xi, Cao Ruihua, Chen Peng, Shi Yi, Zhang Rong, Zheng Youdou

机构信息

School of Electronics Science and Engineering and Key Laboratory of Photonic and Electronic Materials, Nanjing University, Nanjing 210093, China.

出版信息

J Nanosci Nanotechnol. 2013 Feb;13(2):1389-91. doi: 10.1166/jnn.2013.6071.

Abstract

To achieve semipolar InGaN/GaN multi-quantum-well (MQW) structure, we fabricate InGaN/GaN MQW nanowires by using a combination of selectively epitaxial lateral overgrowth and patterned GaN/sapphire substrate techniques. Basing on the SEM observations, the nanowires along different crystal orientation of GaN substrate have various surface morphologies. Furthermore, cathodoluminescence measurements exhibit the dependence of the emission peaks of InGaN quantum wells on the axial direction of nanowires, being mainly attributed to the change of the morphology situation of the side facet. The shift of the peaks is larger than 30 nm as the axial direction of a nanowire varies between [1120] and [1100].

摘要

为了实现半极性InGaN/GaN多量子阱(MQW)结构,我们通过结合选择性外延横向生长和图案化GaN/蓝宝石衬底技术来制备InGaN/GaN MQW纳米线。基于扫描电子显微镜(SEM)观察,沿GaN衬底不同晶体取向的纳米线具有各种表面形貌。此外,阴极发光测量表明InGaN量子阱的发射峰依赖于纳米线的轴向,这主要归因于侧面形貌情况的变化。当纳米线的轴向在[1120]和[1100]之间变化时,峰的位移大于30 nm。

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