Energy and Environmental Division, Korea Institute of Ceramic Engineering and Technology, 233-5 Gasan-dong, Geumcheon-gu, Seoul 153-801, Korea.
Microsc Microanal. 2013 Aug;19 Suppl 5:131-5. doi: 10.1017/S143192761301249X.
The effects of polymer substrates on the interfacial structure and the thermal stability of Ga-doped ZnO (GZO) thin films were investigated. The GZO thin films were deposited on polyethylene terephthalate (PET) and polyethylene naphthalate (PEN) substrates by rf-magnetron sputtering at room temperature, and thermal stability tests of the GZO thin films on the polymer substrates were performed at 150°C up to 8 h in air. Electrical and structural characterizations of the GZO thin films on the PET and the PEN substrates were carried out, and the origins of the stable interfacial structure and the improved thermal stability of the GZO thin film on the PEN substrate were discussed.
研究了聚合物衬底对掺镓氧化锌（GZO）薄膜界面结构和热稳定性的影响。采用射频磁控溅射法在室温下将 GZO 薄膜沉积在聚对苯二甲酸乙二醇酯（PET）和聚萘二甲酸乙二醇酯（PEN）衬底上，并在空气中于 150°C 下对 GZO 薄膜在聚合物衬底上的热稳定性进行了长达 8 小时的测试。对 PET 和 PEN 衬底上 GZO 薄膜的电学和结构特性进行了表征，并讨论了 PEN 衬底上 GZO 薄膜稳定界面结构和提高热稳定性的起源。
