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利用高掺杂蓝宝石上硅的长波红外可调谐薄膜完美吸收体。

Long-wave infrared tunable thin-film perfect absorber utilizing highly doped silicon-on-sapphire.

作者信息

Cleary Justin W, Soref Richard, Hendrickson Joshua R

机构信息

Sensors Directorate, Air Force Research Laboratory, Wright-Patterson Air Force Base, Ohio 45433, USA.

出版信息

Opt Express. 2013 Aug 12;21(16):19363-74. doi: 10.1364/OE.21.019363.

Abstract

We show that nearly perfect absorption can be achieved in a simple structure with highly doped silicon on a sapphire (SOS) substrate. An SOS structure with the n-Si film being 600 nm thick and having doping concentration of 2e19 cm(-3) has an absorption peak of 96% in the film at a wavelength of 12.1 μm. More generally, 95% absorption in the n-Si can be achieved and tailored to specific wavelengths in the range of 11.6-15.1 μm utilizing dopings of 1-2.4e19 cm(-3) and film thicknesses of 600-1000 nm. Regions of 90% absorption can be achievable down to 11 μm and up to as much as 22 μm with tailoring of doping and film thickness. It is also shown that choice of substrate with large k/n (imaginary over real part of refractive index) is imperative for high absorption in the thin-film and will play a role in tailoring possibilities. Shown here are results for n-Si, but in general these results also apply to p-Si and the methods may be used to investigate structures with alternative films or substrates. This investigated SOS structure has high potential since desired film thickness and doping investigated here for perfect absorption can be purchased commercially and easily tuned by etching the silicon film.

摘要

我们表明,在蓝宝石(SOS)衬底上具有高掺杂硅的简单结构中可以实现近乎完美的吸收。一种n型硅膜厚度为600 nm且掺杂浓度为2×10¹⁹ cm⁻³ 的SOS结构,在12.1 μm波长处,该膜的吸收峰值为96%。更一般地,利用1 - 2.4×10¹⁹ cm⁻³ 的掺杂和600 - 1000 nm的膜厚度,可以在n型硅中实现95%的吸收,并将其调整到11.6 - 15.1 μm范围内的特定波长。通过调整掺杂和膜厚度,在低至11 μm和高达22 μm的范围内可以实现90%吸收的区域。还表明,选择具有大k/n(折射率虚部与实部之比)的衬底对于薄膜中的高吸收至关重要,并且在调整可能性方面将发挥作用。这里展示的是n型硅的结果,但一般来说,这些结果也适用于p型硅,并且这些方法可用于研究具有替代薄膜或衬底的结构。这种研究的SOS结构具有很高的潜力,因为这里研究的用于完美吸收的所需膜厚度和掺杂可以通过商业购买,并且通过蚀刻硅膜很容易进行调整。

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