Department of Materials Science and Engineering, Korea Advanced Institute of Science and Tehcnology (KAIST) , Daejeon 305-701, Republic of Korea.
ACS Nano. 2013 Oct 22;7(10):8899-907. doi: 10.1021/nn403379k. Epub 2013 Sep 10.
Complex nanopatterns integrating diverse nanocomponents are crucial requirements for advanced photonics and electronics. Currently, such multicomponent nanopatterns are principally created by colloidal nanoparticle assembly, where large-area processing of highly ordered nanostructures raises significant challenge. We present multicomponent nanopatterns enabled by block copolymer (BCP) self-assembly, which offers device oriented sub-10-nm scale nanopatterns with arbitrary large-area scalability. In this approach, BCP nanopatterns direct the nanoscale lateral ordering of the overlaid second level BCP nanopatterns to create the superimposed multicomponent nanopatterns incorporating nanowires and nanodots. This approach introduces diverse chemical composition of metallic elements including Au, Pt, Fe, Pd, and Co into sub-10-nm scale nanopatterns. As immediate applications of multicomponent nanopatterns, we demonstrate multilevel charge-trap memory device with Pt-Au binary nanodot pattern and synergistic plasmonic properties of Au nanowire-Pt nanodot pattern.
复杂的纳米图案集成了多种纳米组件，是先进光子学和电子学的关键要求。目前，这种多组分纳米图案主要是通过胶体纳米粒子组装形成的，而大面积制备高度有序的纳米结构则带来了重大挑战。我们提出了一种通过嵌段共聚物（BCP）自组装实现的多组分纳米图案，它提供了面向器件的亚 10nm 尺度纳米图案，具有任意大面积的可扩展性。在这种方法中，BCP 纳米图案指导覆盖的第二级 BCP 纳米图案的纳米级横向有序，以创建包含纳米线和纳米点的叠加多组分纳米图案。该方法将包括 Au、Pt、Fe、Pd 和 Co 在内的多种金属元素的化学成分引入到亚 10nm 尺度的纳米图案中。作为多组分纳米图案的直接应用，我们展示了具有 Pt-Au 二元纳米点图案的多级电荷俘获存储器件以及 Au 纳米线-Pt 纳米点图案的协同等离子体特性。
