Hsieh Hung-Lin, Sun Bo-Yen
Department of Mechanical Engineering, National Taiwan University of Science and Technology, No. 43, Keelung Road, Section 4, Da'an District, Taipei 106335, Taiwan.
Sensors (Basel). 2021 Mar 5;21(5):1828. doi: 10.3390/s21051828.
In this study, a compound speckle interferometer for measuring three-degree-of-freedom (3-DOF) displacement is proposed. The system, which combines heterodyne interferometry, speckle interferometry and beam splitting techniques, can perform precision 3-DOF displacement measurements, while still having the advantages of high resolution and a relatively simple configuration. The incorporation of speckle interferometry allows for non-contact displacement measurements by detecting the phase of the speckle interference pattern formed from the convergence of laser beams on the measured rough surface. Experiments were conducted to verify the measurement capabilities of the system, and the results show that the proposed system has excellent measurement capabilities suitable for future real-world applications.
在本研究中，提出了一种用于测量三自由度（3-DOF）位移的复合散斑干涉仪。该系统结合了外差干涉测量法、散斑干涉测量法和分束技术，能够进行精确的三自由度位移测量，同时仍具有高分辨率和相对简单的配置的优点。散斑干涉测量法的加入使得通过检测激光束在被测粗糙表面上会聚形成的散斑干涉图案的相位来进行非接触式位移测量成为可能。进行了实验以验证该系统的测量能力，结果表明所提出的系统具有出色的测量能力，适用于未来的实际应用。
