School of Mechanical Engineering, Yonsei University, 50 Yonsei-ro, Seodaemun-gu, Seoul 120-749, Republic of Korea.
Nanoscale Res Lett. 2013 Oct 4;8(1):409. doi: 10.1186/1556-276X-8-409.
Catalytic iron nanoparticles generated by spark discharge were used to site-selectively grow carbon nanotubes (CNTs) and control their density. The generated aerosol nanoparticles were deposited on a cooled substrate by thermophoresis. The shadow mask on top of the cooled substrate enabled patterning of the catalytic nanoparticles and, thereby, patterning of CNTs synthesized by chemical vapor deposition. The density of CNTs could be controlled by varying the catalytic nanoparticle deposition time. It was also demonstrated that the density could be adjusted by changing the gap between the shadow mask and the substrate, taking advantage of the blurring effect of the deposited nanoparticles, for an identical deposition time. As all the processing steps for the patterned growth and density control of CNTs can be performed under dry conditions, we also demonstrated the integration of CNTs on fully processed, movable silicon microelectromechanical system (MEMS) structures.
利用火花放电产生的催化铁纳米颗粒实现了碳纳米管（CNTs）的位置选择性生长，并控制了其密度。所生成的气溶胶纳米颗粒通过热泳沉积在冷却的衬底上。冷却衬底上方的遮罩使催化纳米颗粒图案化，从而使化学气相沉积合成的 CNTs 图案化。通过改变催化纳米颗粒沉积时间可以控制 CNTs 的密度。还证明了，通过改变遮罩和衬底之间的间隙，利用沉积纳米颗粒的模糊效应，在相同的沉积时间内，可以调整密度。由于 CNTs 的图案化生长和密度控制的所有处理步骤都可以在干燥条件下进行，因此我们还展示了 CNTs 与完全处理的、可移动的硅微机电系统（MEMS）结构的集成。
