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单壁碳纳米管薄膜的晶圆级热泳干法沉积

Wafer-Scale Thermophoretic Dry Deposition of Single-Walled Carbon Nanotube Thin Films.

作者信息

Laiho Patrik, Rafiee Mahdi, Liao Yongping, Hussain Aqeel, Ding Er-Xiong, Kauppinen Esko I

机构信息

Department of Applied Physics, Aalto University School of Science, P.O. Box 15100, FI-00076 Aalto, Finland.

出版信息

ACS Omega. 2018 Jan 31;3(1):1322-1328. doi: 10.1021/acsomega.7b01869.

DOI:10.1021/acsomega.7b01869
PMID:31457968
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6641514/
Abstract

We report the direct and dry deposition of transparent conducting films (TCFs) of aerosol-synthesized single-walled carbon nanotubes (SWNTs) using a thermophoretic precipitator (TP) designed for the uniform and efficient deposition of aerosol-synthesized nanomaterials on 50 mm wafers or similarly sized polymer substrates. The optical and electrical performance of the fabricated TCFs match or surpass the published results achieved using a filter-based collection of aerosol-synthesized SWNTs, and TCFs with sheet resistances of 60 Ω/sq. at 87.8% transmittance and 199 Ω/sq. at 96% transmittance on flexible polymer substrates are demonstrated. The precipitator design is immediately applicable in roll-to-roll fabrication of SWNT TCFs or other functional coatings of aerosol-synthesized nanomaterials.

摘要

我们报道了使用一种热泳沉淀器(TP)对气溶胶合成的单壁碳纳米管(SWNTs)进行透明导电薄膜(TCFs)的直接干法沉积。该热泳沉淀器专为将气溶胶合成的纳米材料均匀且高效地沉积在50毫米晶圆或尺寸类似的聚合物基板上而设计。所制备的TCFs的光学和电学性能与基于过滤器收集气溶胶合成的SWNTs所获得的已发表结果相当或更优,并且展示了在柔性聚合物基板上具有87.8%透光率时方阻为60 Ω/sq以及96%透光率时方阻为199 Ω/sq的TCFs。该沉淀器设计可立即应用于SWNT TCFs的卷对卷制造或气溶胶合成纳米材料的其他功能涂层。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a4bc/6641514/931f15c439d7/ao-2017-01869t_0004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a4bc/6641514/d3b900393bf9/ao-2017-01869t_0001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a4bc/6641514/a14ba74700b7/ao-2017-01869t_0002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a4bc/6641514/931f15c439d7/ao-2017-01869t_0004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a4bc/6641514/d3b900393bf9/ao-2017-01869t_0001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a4bc/6641514/a14ba74700b7/ao-2017-01869t_0002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a4bc/6641514/931f15c439d7/ao-2017-01869t_0004.jpg

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本文引用的文献

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Top Curr Chem (Cham). 2017 Nov 27;375(6):90. doi: 10.1007/s41061-017-0178-8.
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Dry and Direct Deposition of Aerosol-Synthesized Single-Walled Carbon Nanotubes by Thermophoresis.热泳法直接干燥沉积气溶胶合成的单壁碳纳米管。
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