School of Mechanical and Advanced Materials Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan 689-798, Republic of Korea.
Nanoscale Res Lett. 2013 Nov 20;8(1):492. doi: 10.1186/1556-276X-8-492.
With the development of nanomaterial-based nanodevices, it became inevitable to develop cost-effective and simple nanofabrication technologies enabling the formation of nanomaterial assembly in a controllable manner. Herein, we present suspended monolithic carbon single nanowires and nanomeshes bridging two bulk carbon posts, fabricated in a designed manner using two successive UV exposure steps and a single pyrolysis step. The pyrolysis step is accompanied with a significant volume reduction, resulting in the shrinkage of micro-sized photoresist structures into nanoscale carbon structures. Even with the significant elongation of the suspended carbon nanowire induced by the volume reduction of the bulk carbon posts, the resultant tensional stress along the nanowire is not significant but grows along the wire thickness; this tensional stress gradient and the bent supports of the bridge-like carbon nanowire enhance structural robustness and alleviate the stiction problem that suspended nanostructures frequently experience. The feasibility of the suspended carbon nanostructures as a sensor platform was demonstrated by testing its electrochemical behavior, conductivity-temperature relationship, and hydrogen gas sensing capability.
随着基于纳米材料的纳米器件的发展，开发具有成本效益和简单的纳米制造技术以可控的方式形成纳米材料组装变得不可避免。在此，我们展示了悬浮式整体式碳单纳米线和纳米网，它们通过两个连续的 UV 曝光步骤和单个热解步骤以设计的方式制造，在热解步骤中伴随着显著的体积减小，导致微尺寸光刻胶结构收缩成纳米级碳结构。即使由于体相碳柱的体积减小而导致悬浮碳纳米线显著伸长，沿纳米线产生的拉伸应力也不显著，而是沿线厚度增加；这种拉伸应力梯度和桥接碳纳米线的弯曲支撑增强了结构的鲁棒性，并减轻了悬浮纳米结构经常遇到的粘连问题。通过测试其电化学行为、电导率-温度关系和氢气传感性能，证明了悬浮碳纳米结构作为传感器平台的可行性。
