Chang Yun-Chorng, Lu Sih-Chen, Chung Hsin-Chan, Wang Shih-Ming, Tsai Tzung-Da, Guo Tzung-Fang
Department of Photonics and Advanced Optoelectronic Technology Center, National Cheng Kung University, Tainan 701, Taiwan.
Sci Rep. 2013 Nov 28;3:3339. doi: 10.1038/srep03339.
Various infra-red and planar chiral metamaterials were fabricated using the modified Nanospherical-Lens Lithography. By replacing the light source with a hand-held ultraviolet lamp, its asymmetric light emission pattern produces the elliptical-shaped photoresist holes after passing through the spheres. The long axis of the ellipse is parallel to the lamp direction. The fabricated ellipse arrays exhibit localized surface plasmon resonance in mid-infra-red and are ideal platforms for surface enhanced infra-red absorption (SEIRA). We also demonstrate a way to design and fabricate complicated patterns by tuning parameters in each exposure step. This method is both high-throughput and low-cost, which is a powerful tool for future infra-red metamaterials applications.
使用改进的纳米球透镜光刻技术制造了各种红外和平面手性超材料。通过用手持紫外灯代替光源，其不对称发光图案在穿过球体后产生椭圆形光刻胶孔。椭圆的长轴与灯的方向平行。制造的椭圆阵列在中红外波段表现出局域表面等离子体共振，是表面增强红外吸收（SEIRA）的理想平台。我们还展示了一种通过在每个曝光步骤中调整参数来设计和制造复杂图案的方法。这种方法既高通量又低成本，是未来红外超材料应用的有力工具。
